OEM Mass Flow Controllers
OEM질량유량계 Gas > MFC / MFM > OEM Mass Flow Controller- 제품설명
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- 경제적인 가격
- 최상의 안정성
- 다양한 APPLICATION
- Maker : Alicat / USA
- 연락처
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경기본사 : 031-790-1907 (내선2)
대전지사 : 042-824-5167
OEM Gas Flow Controllers
BASIS™ 질량 유량 컨트롤러는 경제적인 패키지로 반복 가능하고 안정적인 제어를 제공합니다.
OEM(Original Equipment Manufacturer) 제품 내에서 스트레스 없는 통합을 위해 설계된 BASIS는 작은 설치 공간, 고정확도 MEMS 센서 및 Alicat의 선도적인 빠른 밸브 제어 기능을 갖추고 있습니다.Technical Data for Alicat BASIS Mass Flow Controllers
0 - 100 sccm Full Scale through 0 - 20 slpm Full Scale
Standard Specifications (Contact Alicat for available options)
Range Specific Specifications
0 - 100 sccm Full Scale through 0 - 20 slpm Full Scale
Standard Specifications (Contact Alicat for available options)
| Performance | BASIS Mass Flow Controller |
| Accuracy at calibration conditions after tare | ±(1.5% Reading + 0.5% Full scale) |
| Zero Shift and Span Shift | ± 0.6% FS/°C/Atm |
| Repeatability | ±0.5% Reading |
| Long term drift | 0.05% Full scale/Year |
| Operating Range/Turndown Ratio | BC-C0100: 1% to 100% Full scale / 100:1 Turndown BC-C1000: 0.5% to 100% Full scale / 200:1 Turndown BC-L0020: 0.5% to 100% Full scale / 200:1 Turndown |
| Maximum Controllable Flow rate | 102% Full scale |
| Typical response time | 100 ms |
| Warm-up time | 70 ms to full scale accuracy |
| Valve Leak Specifications | Internal(leak through) '10-5 atm - cc/sec He External(leak out) 10-9 atm - cc/sec He |
| Operating Conditions | BASIS Mass Flow Controller | |
| Calibration Conditions | 25°C, 14.696 psia | |
| Operating temperature | 0 to +50 °Celsius | |
| Humidity Range (Non-Condensing) | <90% | |
| Maximum Internal Pressure(Static) | BC-C0100&BC-C1000: 145psig | BC-L0020: 60psig |
| Proof pressure | 175 psig | |
| Vibration | 20g; MIL-STD-883E, Method 2002.4 | |
| Mounting attitude sensitivity | None | |
| Valve Type | Normally closed | |
| Ingress protection | IP40 | |
| Wetted materials | 316, silicon nitride, brass, FKM(Viton) | |
| Communications/Power | BASIS Mass Flow Controller |
| Digital input/Output signal | RS-232 or RS-485 Serial |
| Analog input/Output signal | 0-5 Vdc |
| Electrical connection options | 9-pin male D-sub(DB9) |
| Supply voltage | 10 to 30Vdc |
| Supply current | 200mA |
| Features | BASIS Mass Flow Controller |
| Gas Select | Units calibrated with Air have built-in correction equations that allow you to use the gas select command to switch to Argon, Carbon Dioxide, Nitrogen, Oxygen, or Nitrous Oxide. Note: BC-C1000 units that are set to Carbon Dioxide or Nitrous Oxide are limited to a maximum flow rate of 750 sccm instead of 1000 sccm due to the correction factor equations used for these gases. Note: BC-L0020 units that are set to Carbon Dioxide or Nitrous Oxide are limited to a maximum flow rate of 15 slpm instead of 20 slpm due to the correction factor equaions used for these gases. Note: Units calibrated with Hydrogen or Helium can fuction only with that gas. |
| CE, RoHS, and REACH | Compliant |
Range Specific Specifications
| Full scale flow mass controller | Pressure drop at FS flow(mbar) venting to atmosphere |
Mechanical dimensions | Process connections |
| BC-C0100: 100sccm | 10 | 2.6"H*2.5"W*0.9"D | 7/16-20 SAE thread, J1926 port or 1/8" NPT Female |
| BC-C1000: 1000sccm | 10 | ||
| BC-L0020: 20slpm | 350 | 3.0"H*2.8"W*0.9"D | 9/16-18 SAE thread, J1926 port or 3/8" NPT Female |
